MP Series Mechanical Polishing Tshuab
LSTD MP series mechanical polishing tshuab yog tsim los ua kom tau raws li qhov xav tau ntawm polishing ceev ntawm cov ntaub ntawv nyuaj. Cov cuab yeej siv cov phaj hlau mos lossis cov phaj sib xyaw thiab pob zeb diamond slurry nrog cov khoom me me, uas tuaj yeem ua rau cov txheej txheem ua haujlwm ncav cuag daim iav sai sai. Lwm qhov txiaj ntsig tseem ceeb ntawm kev siv tshuab polishing yog tias nyob rau hauv qhov chaw ntawm kev tswj xyuas zoo ntawm cov phaj zoo, nws tuaj yeem tau txais ib qho chaw ua haujlwm tiaj tus heev uas yuav luag tsis muaj ntug tawg. Rau lub workpiece (wafer) nrog daim ntawv thov epitaxial, tom qab txhua yam polishing, cov txheej txheem lub sij hawm ntawm chemical mechanical polishing yuav luv heev, thiab tus nqi yuav raug txo. MP series chemical mechanical polishing tshuab tuaj yeem siv rau txhua yam polishing ntawm ntau yam super nyuaj semiconductor wafers xws li sapphire, silicon carbide thiab pob zeb diamond, nrog rau polishing ntawm lwm cov ntaub ntawv nyuaj xws li ceramics, cemented carbide thiab quenched steel.
Zoo li CP series tshuaj mechanical polishing tshuab:
MP series mechanical polishing machines kuj muab faib ua peb yam qauv: hom yooj yim, siab disc chaw tsav hom (CD hom) thiab siab phaj ywj siab tsav hom (IDP hom) (saib nplooj ntawv 4; MP series mechanical polishing machines muaj cov qauv zoo sib xws rau CP. series chemical mechanical polishing machines, tab sis txhawm rau ua kom tau raws li qhov xav tau ntawm kev siv tshuab polishing, MP series mechanical polishing tshuab tau nruab nrog polishing phaj tig qhov system kom zawj cov phiaj.
IDP Hom mechanical polishing tshuab:
IDP Hom tshuab polishing tshuab kuj tseem tuaj yeem txhim kho cov neeg kho tshuab polishing raug los ntawm kev sib xyaw ua haujlwm viav vias ntawm lub phaj siab; Txhawm rau daws cov teeb meem ntawm kev nthuav dav deformation thiab hardness txo ntawm polishing phaj tshwm sim los ntawm cov cua sov tsim los ntawm cov neeg kho tshuab polishing, LSTD tau tsim cov cuab yeej tshiab thiab thov rau patent uas tuaj yeem tswj cov phaj saum npoo kub, phaj puab thiab phaj hardness; Rau cov neeg kho tshuab polishing ntawm peb tiam semiconductor cov ntaub ntawv xws li silicon carbide, pob zeb diamond thiab lwm yam wafers, cov cuab yeej no tuaj yeem daws tau cov teeb meem ntawm cov tshuab polishing efficiency thiab raug.
BASIC HOM MP series txhua yam polishing tshuab
Hom thiab spec | MP-380B(V*) | MP-460B(V) | MP-610B(V) | MP-810B(V) | MP-910B(V) | MP-1280B(V) | MP-1500B(V) |
Polishing Phaj diameter | 3 81mm | 460 hli | 5 98mm | 7 96mm | 8 98mm | 12 62mm | 14 80mm |
Siab phaj txoj kab uas hla | 139mm ib | 150 hli | 240 hli | 3 04,8mm | 360mm / 355mm | 4 85mm | 5 76mm |
No. ntawm siab phaj | 3 | 4 | 4 | 4 | 4 | 4 | 4 |
Polishing phaj RPM | 10 ~ 160 rpm | 10 ~ 160 rpm | 10 ~ 115 rpm | 10 ~ 87 rpm | 10-80rpm | 10 ~ 64 rpm | 10-54rpm |
Polishing siab (max.) | 100 kg | 100 kg | 140kg ib | 250 kg | 320kg ua | 5 60kg | 7 60kg |
Lub cev muaj zog | 0.75kw | 1.5 kwm | 3 kwv | 5.5 KW TSI | 11 kwv | 22 kwv | 35 kwv |
Fais fab mov | 3PH, 380V, 50Hz | ||||||
Dimension | 1250L 770W 1560H | 1360L 850W 1650H | 1550L 900W 1700H | 1980L 920W 1900H | 2100L 1262W 2120H | 2550L 1670W 2200H | 3500L 2020W 2500H |
Qhov hnyav (kwv yees ..) | 420kg ua | 720kg ua | 10 80kg | 2200 Kg | 2400kg ib | 7 300kg | 9 500kg |
Wafer loading muaj peev xwm | 2"-4pcs/head 2"-3pcs/head(V) | 2"-5pcs/head 2"-4pcs/head(V) | 2"-10pcs/head 4"-3pcs/head | 2"-14pcs/head 4"-5pcs/head 5"-3pcs/head | 4"-7pcs/head 5"-5pcs/head 6"-3pcs/head | 5"-8pcs/head 6"-6pcs/head 8" -3pcs/head | 6"-8pcs/head 8" -5pcs/head |
CD HOM MP series mechanical polishing tshuab
Hom thiab spec | MP-380B-CD | MP-460B-CD | MP-610B-CD | MP-810B-CD |
Polishing Phaj diameter | 3 81mm | 460 hli | 5 98mm | 7 96mm |
Siab phaj txoj kab uas hla | 139mm ib | 150 hli | 240 hli | 3 04,8mm |
No. ntawm siab phaj | 3 | 4 | 4 | 4 |
Polishing phaj RPM | 10 ~ 160 rpm | 10 ~ 160 rpm | 10 ~ 115 rpm | 10 ~ 87 rpm |
Polishing siab (max.) | 100 kg | 100 kg | 140kg ib | 250 kg |
Center tsav lub cev muaj zog | 400W | 750 KW TSI | 1 KW | 1.5 KW TSI |
Main Lub cev muaj zog | 0.75kw | 1.5 KW TSI | 3 kwv | 5.5 KW TSI |
Fais fab mov | 3PH, 380V, 50Hz | |||
Dimension | 1250L 770W 1560H | 1360L 850W 1650H | 1550L 900W 1700H | 1980L 920W 1900H |
Qhov hnyav (kwv yees ..) | 420kg ua | 720kg ua | 10 80kg | 2200 Kg |
Wafer loading muaj peev xwm | 2"-4pcs/head | 2"-5pcs/head | 2"-10pcs/head 4"-3pcs/head | 2"-14pcs/head 4"-5pcs/head 5"-3pcs/head |
Hom thiab spec | MP-910B-CD | MP-1280B-CD | MP-1500B-CD |
Polishing Phaj diameter | 8 98mm | 12 62mm | 14 80mm |
Siab phaj txoj kab uas hla | 360mm / 355mm | 4 85mm | 5 76mm |
No. ntawm siab phaj | 4 | 4 | 4 |
Polishing phaj RPM | 10-80rpm | 10 ~ 64 rpm | 10-54rpm |
Polishing siab (max.) | 320kg ua | 5 60kg | 7 60kg |
Center tsav lub cev muaj zog | 2 KW | 3.5 KW TSI | 5.5 KW TSI |
Main Lub cev muaj zog | 11 kwv | 22 kwv | 35 kwv |
Fais fab mov | 3PH, 380V, 50Hz | ||
Dimension | 2100L 1262W 2120H | 2550L 1670W 2200H | 3500L 2020W 2500H |
Qhov hnyav (kwv yees ..) | 2400kg ib | 7 300kg | 9 500kg |
Wafer loading muaj peev xwm | 4"-7pcs/head 5"-5pcs/head 6"-3pcs/head | 5"-8pcs/head 6"-6pcs/head 8" -3pcs/head | 6"-8pcs/head 8 "5pcs / lub taub hau |
IDP HOM MP series mechanical polishing tshuab
Hom thiab spec | MP-380B-IDP | MP-460B-IDP | MP-610B-IDP | MP-810B-IDP |
Polishing Phaj diameter | 3 81mm | 460 hli | 5 98mm | 7 96mm |
Siab phaj txoj kab uas hla | 139mm ib | 150 hli | 240 hli | 3 04,8mm |
No. ntawm siab phaj | 3 | 3 | 4 | 4 |
Polishing phaj RPM | 10 ~ 160 rpm | 10 ~ 160 rpm | 10 ~ 115 rpm | 10 ~ 87 rpm |
Polishing siab (max.) | 100 kg | 100 kg | 140kg ib | 250 kg |
Siab phaj tsav lub cev muaj zog | 200W | 200W | 400 KW | 400 KW |
Siab phaj rotation ceev | 0 ~ 200rpm | 0 ~ 200rpm | 0~100rpm | 0~100rpm |
Main Lub cev muaj zog | 0.75kw | 1.5 kwm | 3 kwv | 5.5 KW TSI |
Fais fab mov | 3PH, 380V, 50Hz | |||
Dimension | 950L 770W 1560H | 1100L 850W 1650H | 1350L 900W 1700H | 1600L 920W 1900H |
Qhov hnyav (kwv yees ..) | 350kg ua | 350kg ua | 9 80kg | 1800kg ib |
Wafer loading muaj peev xwm | 2"-4pcs/head | 2"-4pcs/head | 2"-10pcs/head 4"-3pcs/head | 2"-14pcs/head 4"-5pcs/head 5"-3pcs/head |
Hom thiab spec | MP-910B-IDP | MP-1280B-IDP | MP-1500B-IDP |
Polishing Phaj diameter | 8 98mm | 12 62mm | 14 80mm |
Siab phaj txoj kab uas hla | 360mm / 355mm | 4 85mm | 5 76mm |
No. ntawm siab phaj | 4 | 4 | 4 |
Polishing phaj RPM | 10-80rpm | 10 ~ 64 rpm | 10-54rpm |
Polishing siab (max.) | 320kg ua | 5 60kg | 7 60kg |
Siab phaj tsav lub cev muaj zog | 2 KW | 1 KW | 1.3 KW TSI |
Siab phaj rotation ceev | 2 KW | 0~100rpm | 0~100rpm |
Main Lub cev muaj zog | 11 kwv | 22 kwv | 35 kwv |
Fais fab mov | 3PH, 380V, 50Hz | ||
Dimension | 1800L 1262W 2120H | 2180L 1670W 2200H | 2800L 2020W 2500H |
Qhov hnyav (kwv yees ..) | 2200 Kg | 7 000kg | 8600kg |
Wafer loading muaj peev xwm | 4"-7pcs/head 5"-5pcs/head 6"-3pcs/head | 5"-8pcs/head 6"-6pcs/head 8" -3pcs/head | 6"-8pcs/head 8 "5pcs / lub taub hau |
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