Chemical Mechanical Polishing Tshuab (CMP)
EXPERT hauv ultra precision dav hlau machining
Ua kom pom tseeb ntawm ultra precision dav hlau machining txij li thaum LSTD tsim.Txhim kho thiab ua kom paub tshiab & qib siab lapping / polishing khoom thiab thev naus laus zis rau cov neeg siv khoom thoob ntiaj teb; Nrog kev nplua nuj nyob rau hauv ultra precision tiaj machining, LSTD tau mob siab rau muab peb cov neeg siv khoom thoob ntiaj teb nrog kev txhim khu kev qha tag nrho.
Cov kws tshaj lij tau txais los ntawm kev paub txog kev sib koom ua ke hauv cov ntaub ntawv sib txawv
Cov kev lag luam uas peb muaj xws li: semi-conductor, opto-electronics, precision optics, precision ceramics, nuclear cog, roj av exploitation thiab industrial daim ntawv thov.
Dedicated los muab customized tag nrho cov kev daws teeb meem
Ua tau raws li ntau yam kev xav tau los ntawm cov neeg siv khoom los ntawm cov tshuab & kev hloov kho tshuab, khoom siv, kev tsim kho, kev pabcuam subcontractor.
Chemical Mechanical Polishing (CMP) Tshuab
CP Chemical Mechanical Polishing Tshuab (CMP Tshuab)
- CMP series tuaj yeem ua cov khoom lag luam semiconductor xws li SI, SIC, GaAs, lnP, GaN, CdTe, pob zeb diamond, thiab lwm yam.
- Phaj txoj kab uas hla ntawm 381mm txog 1500mm.
- Siab phaj txoj kab uas hla ntawm 139mm mus rau 576mm.
- Wafer loading peev 2inch 3inch 4inch 5inch 6inch 8inch 12inch
Precise wax bonding tshuab
- Lub phaj siab, lub phaj txias thiab lwm qhov chaw tiaj tus los yog qhov chaw siab ntawm cov cuab yeej yog grinded los tswj lawv cov flatness thiab zoo xyuas qhov tseeb ntawm waxing.
- Siab phaj txoj kab uas hla 360mm Max.
- cua sov kub 300 degree
- Pneumatic; Max.350kg
Multi-functional polishing tshuab
- MFP-700A yog ntau lub tshuab polishing tsim tshwj xeeb rau cov khoom siv semiconductor.
- Nqus chuck txoj kab uas hla 450mm, max txoj kab uas hla ntawm workpiece 576mm.
- Daim ntawv thov: Silicon Etching Nplhaib, SiC Etching Nplhaib, Silicon Upper Electrode, Da Dej Taub Hau
- Kab rov tav txav deb ntawm polishing phaj:0-140mm
Tsis siv neeg wafer debonding tshuab
- Nws yog cov cuab yeej pabcuam hauv semiconductor polishing rhiav uas cia li tshem tawm cov wafers sib koom ua ke ntawm cov phaj ceramic nrog wax siv rab riam chipping rau hauv cassette.
- Nws tuaj yeem siv los ua cov cuab yeej ywj pheej, uas tuaj yeem txo qhov kev pheej hmoo ntawm wafer tawg, khawb, thiab lwm yam.
- Zoo heev txhim kho efficiency ntawm lub scraping.
Vim li cas LSTD yog koj qhov kev xaiv zoo tshaj?
95, 000 sq ft ntau lawm thiab cov khoom muag.
Semiconductor R & D chaw, thiab tus kheej muaj SiC wafer tsis siv neeg polishing kab.
Pab pawg R & D muaj siab nrog BS qib lossis siab dua rau kev txhim kho cov txheej txheem.
Kev txhawb nqa kev muag khoom thoob ntiaj teb, pab cov neeg siv khoom thoob ntiaj teb (USA, Fabkis, Lub Tebchaws Yelemees, Singapore, South Africa, thiab lwm yam)
Kub muag khoom
