IDP Hom Tshuaj Mechanical Polishing Tshuab
Txhua lub phaj siab ntawm CP series chemical mechanical polishing tshuab nrog kev ywj pheej tsav ntawm lub phaj siab yog tsav los ntawm cais servo reducer. Tsis zoo li txoj hauv kev uas lub hauv paus qhia cov menyuam tsav CP tshuab yog tsav los ntawm kev sib txhuam, lub siab phaj ywj siab tsav CP tshuab tuaj yeem paub qhov tseeb ceev tswj ntawm lub phaj siab. Nyob rau tib lub sijhawm, vim yog cov qauv ntawm kev zam kev sib txhuam hauv cheeb tsam polishing, tiam ntawm cov khoom siv lead ua ntawm polishing slurry yog txo, Yog li, qhov tshwm sim ntawm cov pa phem thiab khawb ntawm qhov chaw ntawm wafer yog txo; Kev sib hloov ceev ntawm txhua lub phaj siab ntawm IDP tshuab tuaj yeem teem caij sib cais. Raws li cov yam ntxwv ntawm lub tog raj kheej pressurizing ntawm txhua lub phaj siab, kev ua tiav yuav luag xoom qhov sib txawv ntawm cov phaj siab sib txawv tuaj yeem ua tiav los ntawm kev hloov kho zoo ntawm kev sib hloov ceev ntawm cov phaj siab.
Rau IDP cov cav tov nrog qhov loj, qhov chaw thiab chaw nres tsheb hloov ntawm cov phaj ceramic tuaj yeem pom tau los ntawm kev ntxiv cov khoom siv sab hauv thiab sab nraud, kom paub txog kev thauj khoom thiab tshem tawm hauv ib qho chaw nres tsheb. Nws tseem tuaj yeem paub txog kev sib txuas ntawm ntau lub tshuab los ntawm kev sib koom ua ke manipulator los tsim cov kab ntau lawm.
IDP HOM CP series tshuaj kho tshuab polishing tshuab
Hom thiab spec | CP-380B-IDP | CP-460B-IDP | CP-610B-IDP | CP-810B-IDP |
Polishing Phaj diameter | 3 81mm | 460 hli | 6 10mm | 8 12mm |
Siab phaj txoj kab uas hla | 139mm ib | 150 hli | 240 hli | 3 04,8mm |
No. ntawm siab phaj | 3 | 3 | 4 | 4 |
Polishing phaj RPM | 10 ~ 160 rpm | 10 ~ 160 rpm | 10 ~ 115 rpm | 10 ~ 87 rpm |
Polishing siab (max.) | 100 kg | 100 kg | 140kg ib | 250 kg |
Siab phaj tsav lub cev muaj zog | 200W | 200W | 400 KW | 400 KW |
Siab phaj rotation ceev | 0 ~ 200rpm | 0 ~ 200rpm | 0~100rpm | 0~100rpm |
Main Lub cev muaj zog | 0.75kw | 1.5 kwm | 3 kwv | 5.5 KW TSI |
Fais fab mov | 3PH, 380V, 50Hz | |||
Dimension | 950L 770W 1560H | 1100L 850W 1650H | 1350L 900W 1700H | 1600L 920W 1900H |
Qhov hnyav (kwv yees ..) | 350kg ua | 350kg ua | 9 80kg | 1800 kg |
Wafer loading muaj peev xwm | 2"-4pcs/head | 2"-4pcs/head | 2"-10pcs/head 4"-3pcs/head | 2"-14pcs/head 4"-5pcs/head 5"-3pcs/head |
Hom thiab spec | CP-910B-IDP | CP-1280B-IDP | CP-1500B-IDP |
Polishing Phaj diameter | 9 14mm | 12 82mm | 1500 hli |
Siab phaj txoj kab uas hla | 360 hli | 4 85mm | 5 76mm |
No. ntawm siab phaj | 4 | 4 | 4 |
Polishing phaj RPM | 10-80rpm | 10 ~ 64 rpm | 10-54rpm |
Polishing siab (max.) | 320kg ua | 5 60kg | 7 60kg |
Siab phaj tsav lub cev muaj zog | 2 KW | 1 KW | 1.3 KW TSI |
Siab phaj rotation ceev | 2 KW | 0~100rpm | 0~100rpm |
Main Lub cev muaj zog | 11 kwv | 22 kwv | 35 kwv |
Fais fab mov | 3PH, 380V, 50Hz | ||
Dimension | 1800L 1262W 2120H | 2180L 1670W 2200H | 2800L 2020W 2500H |
Qhov hnyav (kwv yees ..) | 2200 Kg | 7 000kg | 8600kg |
Wafer loading muaj peev xwm | 4"-7pcs/head 5"-5pcs/head 6"-3pcs/head | 5"-8pcs/head 6"-6pcs/head 8" -3pcs/head | 6"-8pcs/head 8 "5pcs / lub taub hau |
Cim npe nrov: Tuam Tshoj idp hom chemical mechanical polishing tshuab manufacturers, lwm tus neeg, Hoobkas
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