Polishing Templates

Template yog rau kev tuav ntawm wafers los ntawm dej zaj duab xis nro es tsis txhob los ntawm wax, piv nrog txoj kev tuav wafers los ntawm wax, siv templates los tuav wafer yog cov efficiency ntau dua thiab tsawg dua cov nqi ntau lawm. Lub hnab tshos ntawm cov qauv tuaj yeem ua rau ntau yam duab thiab qhov tob rau kev tuav ntawm qhov tshwj xeeb.

Txhawm rau tswj cov geometry precision ntawm polished wafers, templates feem ntau adhered rau ntawm ceramic phaj nrog nws PSA daim kab xev rov qab. Ua raws li cov ntaub ntawv ntawm wafers thiab cov yam ntxwv ntawm slurries, ntau hom thaub qab zaj duab xis tuaj yeem xaiv. Rau polishing ntawm Si wafer, sapphire wafers, nws raug nquahu kom siv qhib cell rov qab zaj duab xis, thaum rau polishing ntawm GaAs, InP, CZT thiab lwm yam. qhov twg polishing slurry yog ntau corrosive, kaw cell rov qab zaj duab xis yog pom zoo.

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