chemical mechanical polishing tshuab yog cov txheej txheem ntsuas ntsuas siv hauv kev siv hluav taws xob thiab kev sib txuas lus thev naus laus zis, aviation thiab aerospace science thiab thev naus laus zis.
Siv dej deionized los paste silicon wafers los yog siv lub tshuab nqus tsev adsorption silicon wafers rau polishing, tso tseg txoj kev ib txwm siv ntawm waxing thiab pasting silicon wafers, uas yog qhov zoo rau kev ntxuav ntawm silicon wafers tom qab polishing. 2. Nrog kev ua haujlwm siab rov qab, nws tuaj yeem txhim kho qhov sib xws ntawm polishing. 3. Nruab nrog polishing kawg taw tes kom paub qhov system tiv thaiv kev polishing dhau. Siv SiO2 ua piv txwv, WIWNU (hauv-chip tsis sib xws) Tsawg dua lossis sib npaug li 3 feem pua, WTWNU (hauv-chip tsis sib xws) Tsawg dua lossis sib npaug li 5 feem pua, thiab RMS (20μm × 20μm) tsawg dua 0.4nm.
