Kev sib tsoo kua yog muab faib raws li nws cov txheej txheem ntawm kev txiav txim: mechanical action sib tsoo kua, chemical mechanical action sib tsoo kua.
Mechanical sib tsoo kua: pob zeb diamond, B4C, thiab lwm yam yog siv los ua abrasives, dispersed mus rau hauv cov kua nruab nrab los ntawm kev ntxiv dispersants, thiab lwm yam., los tsim cov kua nrog sib tsoo nyhuv, hu ua pob zeb diamond sib tsoo kua, boron carbide sib tsoo kua, thiab lwm yam. faib dawb hauv cov kua dispersion, thiab kev sib tsoo thiab thinning ntawm workpiece yog paub los ntawm kev siv lub hauv paus ntsiab lus hais tias lub hardness ntawm lub abrasive yog ntau dua li ntawm lub workpiece mus rau hauv av. Raws li qhov saum npoo ntawm cov abrasive, qhov loj ntawm cov khoom, kev teeb tsa ntawm cov kua sib tsoo, kev ruaj ntseg ntawm cov cuab yeej sib tsoo, thiab lwm yam, tom qab kev sib tsoo tiav, cov khawb loj lossis me me yog qhov yooj yim kom tso rau ntawm qhov chaw. lub workpiece. Yog li ntawd, mechanically acting abrasives feem ntau yog siv rau kev sib tsoo ntxhib, ua raws li kev sib tsoo thiab polishing.
Tshuaj-mechanical sib tsoo kua: Tshuaj-mechanical sib tsoo kua siv lub hauv paus ntsiab lus ntawm "mos sib tsoo thiab hardening" nyob rau hauv hnav, uas yog, polishing nrog softer cov ntaub ntawv mus cuag ib tug zoo polished nto. Nws yog kev sib xyaw ua ke ntawm kev sib tsoo thiab tshuaj lom neeg corrosion. Nws tsim ib qho chaw du thiab tiaj tus ntawm qhov chaw nruab nrab hauv av los ntawm kev sib tsoo thiab tshuaj lom neeg corrosion ntawm ultrafine hais. Yog li, chemical mechanical polishing fluid tseem hu ua chemical mechanical polishing fluid (Chemical Mechanical Polishing, hu ua CMP). Nyob rau hauv lub xub ntiag ntawm ib tug tej yam siab thiab polishing slurry, lub workpiece yuav tsum polished tsiv mus rau lub polishing ncoo, thiab ib tug du nto yog tsim nyob rau saum npoo ntawm polished workpiece los ntawm cov organic ua ke ntawm kev sib tsoo nyhuv ntawm nanoparticles thiab lub Cov nyhuv corrosion ntawm oxidant.
